과목개요

This module consists of basic information on MEMS, nanomechanics and measurement technology at nanoscale. Various technologies measuring local mechanical properties of nanomaterials and nanostructures are introduced in detail in nanoscale measurement technologies. Special attentions are given to theory and practice of scanning probe microscopy.

교육목표

This module aims to provide students with necessary information of MEMS process, technical principles of measuring local nanomechanical behavior of nanostructured or nanopatterned materials and adhesion property of nanoscale films and coatings. The module also aims to develop students’ capability in material characterization at nanoscale which possesses practical importance relevant to the fields of mechanical and manufacturing engineering.