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- 주제분류
- 공학
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- 강의학기
- 2025년
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- 조회수
- 80
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강좌 소개수업내용/목표본 강좌는나노공정의다양한원리와방법론을익히고,이에대한기본적인이해를 바탕으로공정(fabrication)을넘어서생산(manufacturing)을위한방법과새로운시도에대해 공부하여주체적으로 나노공정을 제시할 수있도록한다.홍보/예시 영상강좌 운영 계획 주차주제단원소주제과제1나노공정소개(Introduction to nanofabrication)1-1나노공정의 전반적인소개(General introduction to nanofabrication)퀴즈1-2나노공정에 대한소개(탑다운공정)(Introduction to top-down nanofabrication)퀴즈1-3나노공정에 대한소개(바텀업공정)(Introduction to bottom-up nanofabrication)퀴즈2나노공정기초 (1)(Basis of nanofabrication(1))2-1포토리소그래피(Photolithography)퀴즈2-2포토리소그래피심화(Advanced techniques of photolithography)퀴즈2-3박막증착(화학증착법)(Chemical deposition)퀴즈3나노공정기초 (2)(Basis of nanofabrication(2))3-1박막증착(물리증착법)(Physical deposition)퀴즈3-2에칭(습식식각)(Wet etching)퀴즈3-3에칭(건식식각)(Dry etching)퀴즈4나노공정(Top-down)(Top-down nanofabrication)4-1전자빔리소그래피(Electon-beam lithography)퀴즈4-2전자빔 리소그래피심화(Advanced techniques of electron-beam lithography)퀴즈4-3집속이온빔밀링(Focused ion-beam milling)퀴즈5나노공정(Bottom-up)(Bottom-up nanofabrication)5-1VLS 공정(Vapor-liquid-solid method)퀴즈5-2자기조립공정 (나노입자)(Self assembly: nanoparticle)퀴즈5-3자기조립공정 (단...
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