This course is designed to provide a comprehensive understanding of the science and technologies for making materials and functional devices at the nanometer scale (approximately 100 nm and below). Fabrication, characterization, and applications of the functional nanoscale devices will be covered, with a discussion of the fundamental physics, chemistry, and the practical aspects of the devices. Topics covered include: Different approaches for creating nanostructures and nanodevices, including “top down” and “bottom up” techniques; Imaging technologies, including photon, electron, scanning probe; Characterization; and Applications. Each topic will be explored in terms of the underlying physics, chemistry and material science, how the various fabrication technologies are used, what their physical limitations are and why, and how they may be combined to build functional structures and devices.