반도체제조공학

반도체 집적회로의 제조공정에 관하여 폭넓은 이해를 갖도록 하여 향후 반도체 분야의 산업계로 진출하거나 관련 연구를 수행하는데 도움이 되도록 합니다.

Introduction

1.	Introduction	Orientation
	Introduction and Historical Perspective(1)	ch.1 1-46
2.	Introduction and Historical Perspective(2)	ch.1 47-109
	Introduction and Historical Perspective	ch.1 동영상1
3.	Introduction and Historical Perspective	ch.1 동영상2
	Introduction and Historical Perspective	ch.1 110-157
4.	Modern CMOS Technology	ch.2 1-33
	Modern CMOS Technology	ch.2 34-64
5.	Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers	ch.3 1-13
	Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers	ch.3 14-34
6.	Semiconductor Manufacturing -Yield, Clean rooms, Wafer Cleaning	ch.4 1-34
	Semiconductor Manufacturing -Yield, Clean rooms, Wafer Cleaning	ch.4 35-53
7.	Photolithography	ch.5 1-34
	Photolithography	ch.5 35-58
8.	Photolithography	ch.5 59-85
	Webex	Webex
9.	Thrmal Oxidation and the Si/SiO2 Interfece	ch.6 1-25
	Thrmal Oxidation and the Si/SiO2 Interfece	ch.6 26-51
10.	Dopant Diffusion/ Ion Implantation	ch.7-8 1-10
	Dopant Diffusion/ Ion Implantation	ch.7-8 21-54
11.	Thin Film Deposition Part1. Chemical Vapor Deposition	ch.9 pt.1 1-18
	Thin Film Deposition Part1. Chemical Vapor Deposition	ch.9 pt.1 19-37
12.	Thin Film Deposition Part1. Chemical Vapor Deposition	ch.9 pt.1 38-86
	Thin Film Desposition Part2. Physical Vapor Deposition	ch.9 pt.2
13.	Etching	ch.10 1-25
	Etching	ch.10 26-65
14.	Interconnect	ch.11 1-25
	Interconnect	ch.11 26-128