반도체제조공학

강의상세

Introduction to Semiconductor Fabrication Processes

1.		Introduction to Semiconductor Fabrication Processes
		Introduction and Historical Perspective 01
2.		Introduction and Historical Perspective 02
		3D Integration / 반도체 관련 산업 01
3.		반도체 관련 산업 02 / Modern CMOS Technology
		Active Region Formation(Isolation)
4.		Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers
		Raw Materials, Purification / Wafer Preparation / Manufacturing Equipment / Semiconductor Manufacturing - Yield 01
5.		Semiconductor Manufacturing - Yield Clean Rooms, Wafer Cleaning 02
		Clean Room
6.		Gettering
		Photolithograghy
7.		Photoresist
		Homework & Quiz 01
8.		Quiz 02 / Cleaning / Gate Oxidation
9.		Thermal Oxidation and the Si/Sio2 Interface / Hardware
10.		Sikicon Oxide
		Oxidation Process
11.		Characterzation / Dopant Diffusion 01 / Ion Implantation 01
		Dopant Diffusion 02 / Ion Implantation 02 / Hardware 01
12.		Hardware 01 / Evaluation
		Thin film & 박막제조공학
13.		Wha is CVD / Thermal CVD - LPCVD . APCVD
		Other Types of the CVD - PECVD , HDPCVD , MOCVD , ALD 01
14.		Other Types of the CVD - PECVD , HDPCVD , MOCVD , ALD 02 / Aplication of CVD Thin Films
		Thin Films Deposition Part 2 / Physical Vapor Deposition
15.		Etching
		Review