MEMS 특론

울산과학기술원
Marc J. Madou

페이스북 트위터 카카오톡 네이버밴드 링크복사

주제분류

공학 >정밀ㆍ에너지 >나노공학
등록일자

2009.10.13

조회수

9,050
평점

5/5.0 (1)

This graduate/senior undergraduate course introduces engineering and science students to the science of miniaturization. Different options to make very small machines (micro and nano size) are reviewed, materials choices are discussed, scaling laws are analyzed and many practical applications are reviewed.

수강안내 및 수강신청
※ 수강확인증 발급을 위해서는 수강신청이 필요합니다

Introduction

차시별 강의

1.		Introduction
2.		Biomimetics
3.		UV Lithography
		UV Lithography
4.		Advanced Lithography
5.		C-MEMS
6.		Advanced Lithography
7.		Advanced Lithography
		Dry Etching-General Principles
		Dry Etching-General Principles
8.		Si Crystal Growth, Crystal Oreintation, Oxidation and Intreface Defects
9.		Wet Bulk Micromachining
10.		Physical and chemical Vapor deposition
		LIGA
		Physical and chemical Vapor deposition
11.		Surface Micromachining
		Surface Micromachining